CDE Resmap 463


Product ID: 17171

Category: Back-End Processing Equipment

Equipment Type: Probers

Usage History: Used 5+ Years

Current State: Functional - Disassembled Demonstrable

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Type: Probers

Equipment Details

300mm FOUP handler;
mini-environment; dual or quad probe changer
Minimum Edge
(center of probe to edge of film)
Wafer Size:
300mm auto load;
adaptor for 300mm &
200mm open cassette (extra);
manual load any size
Computer System:
Pentium class 1.2 GHz, 512MB RAM, 40GB HD, DVD-RW, FD; 15” monitor; operating system: Windows XP
Max Diameter:
SECS-II Option (need to confirm)
Max Square:
10.5” x 10.5”
POD-ID Option:
1 second per site
Mapping Patterns:
Polar map (align with notch/flat, straddle or follow flat); rectangular map (can choose inside edge exclusion); line scan (diameter, radius or any point to point along diameter, minimum step 0.1mm); user defined template
Typical Wafer
Handling Time:
8 seconds each way
Contour (spacing choice, 1/3?, fixed and auto %), 3D, line, data map, histogram, data sequence, radial and angular distributions; various modes of trend charts available
Typical Notch
Find Time:
5 seconds; standard NF
All ResMap data files such as maps, etc. can be ported to programs such as Excel® for further analysis.
35 wph with notch find
(49 sites)
2 m? - 5 M?;
may be optimized to 1 m?
House Vacuum :
Required; >500 mm Hg, on 1/4” OD flexible tubing
Repeatability (1?):
? ±0.02% (static or Rs pack);
? ±0.1% (dynamic nearby spots, typical)
AC Power:
100V to 240V < 10 KVA
? ±0.5% Using NIST traceable ResCal standards
Size (inches):
width x depth x height
22”w x 44”d x 60”h; stand alone (computer system, etc. enclosed)

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