Eaton-Axcelis GSD Implanter Spare Parts


Product ID: 17445

Category: Front-End Processing Equipment

Equipment Type: Parts and Components

Usage History: Used 5+ Years

Current State: Non Functional - Parts

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Equipment Details

Parts are from a High Energy Implanter, but are generic to all GSD Models

Tools are currently stored in a dry warehouse.

  • Process disk, 150mm, Eaton Made, cleaned-used condition, Part # 113 RSS
  • ELS source, cleaned-used, Plansee Made, Good Condition
  • Suppressor electrode, cleaned-used, Plansee Made, Good Condition
  • Leybold turbo, 1000C, re-furbished in 2015 by Leybold and never used
  • Affinity triple loop chiller, looks new, shipped to site in 2006 and never used
  • Part #: CWA-200L-HE-3 LP
  • Source liner, modified for easy removal


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