Leybold Optics PVD System DIS 2000V - Solar


Product ID: 17426

Category: Front-End Processing Equipment

Equipment Type: Evaporators

Usage History: Used < 1Year

Current State: Functional - Deinstalled Demonstrable 

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Type: Evaporators

Equipment Details

The Leybold Optics PVD DIS 2000V Side Sputter system is fully functional, and currently configured for Solar Manufacturing.  System currently configured for holding up to 175 square wafers.  System can be configured for any size and shape wafer, with the change of the pallet.  Quotes can be provided for custom pallets. 

The system was installed and run in a R&D capacity only.  System was never run in a production capacity. 

The system consists of three chambers: Heater, Targets and Loading.

Turbo pumps, ancillary pumps and blowers included.

Custom Crane used to move cathodes is included in the sale.

Installation quote can be provided upon request.


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