Beta Squared Lithography, Inc (formally Perkin Elmer) OS2000 Micralign

Beta Squared Lithography

Product ID: 17100

Category: Front-End Processing Equipment

Equipment Type: Mask Aligners

Usage History: Used 5+ Years

Current State: Functional - Disassembled Demonstrable

Ask an Expert: JULO Advisory

Call Us: +1 (855) 222-5856
Stay current on live opportunities: Subscribe >

Equipment Details

  • Resolution: 1.25um lines and spaces, UV-4 (340-440nm); 1.0um lines and spaces, UV-3 (300-350nm)åÊ
  • Machine to machine overlay: +/- 0.25um, 125/100mm systems, 98% of data, +/-0.30um, 150mm systems, 98% of dataåÊ
  • Machine to itself overlay: +/- 0.25 um, 98% of dataåÊ
  • Throughput: 120 wafers per hour, 125/100mm systems, 100 wafers per hour 150mm systemsåÊ
  • Depth of focus: +/- 6um for 1.5um lines and spacesåÊ
  • Focus Stability: +/- 2.0um over 6 daysåÊ
  • Focus Range: +/- 200um, +/-450um w/extended bellows chuck (only available with OS2000)åÊ
  • Partial Coherence: Variable, 0.37 to 0.86åÊ
  • Numerical Aperture: .167åÊ
  • Uniformity of Illumination: +/- 3.0%åÊ
  • Particle Generation: <7 particles per wafer pass (1.0um or larger)åÊ
  • Prealignment and first-level placement accuracy: +/-15umåÊ
  • Footprint: 18.65 square feet (1.732 square meter)åÊ
  • Wafer / substrate size standard: 100, 125, 150mm (other configurations available on special order)åÊ
  • Electrical: 120vac at 10amps, or 240vac at 5 amps (computer, display unit, motor unit)åÊ
  • Overall throughput yield: up to 30% increase in production capacity due to the following:åÊ
  • Operator setup time reduction:åÊ
    • Mask and wafer stage locations of each process are saved. Future downloading of a process places the mask and wafer stag to the process‰۪s pre-determined location that is close to previous alignment.åÊ
    • Focus starting actuator positions (opcode 121) for each process lot are determined automatically allowing for seamless loading of thin and thick wafers, they are detected automatically and run without interruption.åÊ
  • Processing time reduction:åÊ
    • 99.9% of all your current processes will run automatically without assists (ie: manual jobs will run automatically). This benefit to throughput will vary depending on processes run in your facility.åÊ
    • Current difficult automatic alignments due to poor target definition run faster and with no interruptions (IE: Phantom Line, iteration count exceeded).åÊ
    • Reduction in test wafers due to predetermined mask and wafer stage pre-loading. This allows more stability due to consistent stage spring loading, which reduces alignment, scan mag and skew errors during scanning.åÊ
    • Faster IA due to prealigner feedback loop that automatically removes theta error from process jobs by electronically updating and offsetting the Prealignment position.åÊ
  • Mis-processing reductions:åÊ
    • Overlay corrections (alignment, mag, skew) are easier, less error prone by using data input fields that allow corrections to be made and viewed along with history.åÊ
    • Focus starting actuator positions (opcode 121) for each process lot are determined automatically and prevents wafer breakage due to crashing into gauge head.åÊ
    • Process download / run checking to eliminate processing with incorrect Mask.åÊ
  • Uniformity features:åÊ
    • Lamp hour monitor that is reset during a lamp change.åÊ
    • Automatic uniformity arm positioning to high and low slit position for ease of adjustmentsåÊ
    • Full graphic display of uniformity around the slit imageåÊ
    • Aperture default is configurable to place proper aperture in placeåÊ
    • All critical information display on one screenåÊ
    • Hold flag position is settable through software (IE: no more hard to access adjustments through the back of the machine)åÊ
  • Mask load features:åÊ
    • Vacuum failure allows a retry operation avoiding the need to unload the MaskåÊ
  • History:åÊ
    • This system was purchased new from the OEM and ran in an R&D facility producing LED‰۪s.åÊ
    • Original purchase price of 640,000.00åÊ
    • The condition is excellent and known workingåÊ
    • The company was purchased and technology transferred out of state, thus the line is no longer needed ‰ÛÒ therefore the system is available and comes complete with several spare parts and user‰۪s manuals

Related Items


Contact Us | +1 (855) 222-5856

JULO Advisory Services

JULO Advisors leverage innovative tools to tailor your surplus solution: targeted mass marketing efforts, global equipment marketplace, online auctions and expert advisory services. By offering customized end-to-end surplus solutions, JULO is among the fastest growing disposition and procurement service providers in the world (Assets Under Management). + Learn More

Valuation Services - Providing data-driven asset appraisals based on current and historical transaction analytics.

Asset Management - Assisting with the development and execution of in-house and outsourced asset management programs.

Facility Disposition - Offering customized transaction advisory and execution of whole facilities, including assets.

Liquidity Solutions - Ensuring surplus assets are quickly sold through the right channels to the right buyers for the highest value.

Shipping & Logistics - Managing the logistical planning for crating and delivery of assets across the globe.

Procurement SolutionsAdvising throughout the entire asset purchasing process for equipment and whole manufacturing plants .


JULO Referral Program

Capitalize on your network and connections. The JULO Referral Program invites everyone to participate, share, and support each other to better the industries in which we serve. Upon a successful transaction with your referral, you will earn 10% on JULO’s equipment revenue for that transaction+ Learn More