Canon PLA-501S

Canon

Product ID: 10076

Category: Front-End Processing Equipment

Equipment Type: Mask Aligners

Usage History: Refurbished

Current State: Functional - Installed Demonstrable

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Equipment Details

Proximity / Contact Mask Aligner set from 2" to 5" wafer size.
Options:
Illumination System with any of a variety of light sources
Fiber Optic Illumination viewing optics with this 150 Watt Illumination System for the Alignment Scope Light
With the camera and TV monitor
With the camera, TV monitor and IR back- side alignment capabilities
Features:
Contact/Proximity Alignment
Fiber Optic Illumination viewing optics with this 150 Watt Illumination System
High Resolution Video
Wafer Sizes: 2" to 6" Semi Spec, Pieces, Squares
Wafer Feed: Manual and/or Cassette to Cassette Auto Feeder
Alignment: Manual / Automatic
UV Power: 250, 350, 500 Watts, 1 and 1.5 Kilo Watts
UV Spectrum: Deep UV, NEAR Deep UV, Near UV
Resolution: Less Than .4um in Hard Contact
For Additional Gap Unit: price $5000.00
For Additional Gap Checking Unit: price $3,500
Ready for Delivery Time: ~3 weeks
Warranty: 6 months - full equipment

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