Balzers SCS800 E Beam Box Coater


Product ID: 10080

Category: Front-End Processing Equipment

Equipment Type: Vacuums

Usage History: Refurbished

Current State: Functional - Installed Demonstrable

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Type: Vacuums

Equipment Details

Balzers SCS-800 includes 35 1/2"" w x 35"d x 26" high water traced ss deposition chamber w/horizontal substrate rotary & full opening, hinged, "O" ring sealed door w/film shutter viewport. The source chamber is isolated from the deposition chamber by a large plate valve in order to facilitate short pump down times. The pumping system consists of a Balzers Model RCP501Z cryopump rated at 27500 l/s water vapor or 10,000 l/s air, complete w/Balzers Model UCC064 water cooled compressor, all hoses, cables, temperature indicator, electropneumatic valves/microprocessor controlled sequencer & Balzers DUO100-57 CFM- mechanical pump. The evaporative system includes a Balzers Model ESQ113, multi-pocket E Beam Gun w/one 60 cc crucible & two 30 cc crucibles w/turret source selector, wire feed, shutter, Balzers EHV110A -15 KW- E Beam power supply w/one EKS110A gun control & one LCS110A longitudinal sweep control, substrate heaters controller, RF power supply &matching network for RF etch, and Ionization & pirani gauges.

This vacuum system is guaranteed to be serviceable.
All major system components are guaranteed for 60 days from receipt.
This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning & calibration. Buyer must undertake these repairs. This is not turnkey.

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