K H Frederick 1854 32' Box Thermal Evaporator

K H Frederick

Product ID: 10085

Category: Front-End Processing Equipment

Equipment Type: Evaporators

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Evaporators

Equipment Details

Includes 32" dia z 30" tall cylindrical back stainless steel chamber with full opening, hinged, o-ring sealed door with 6" ID viewport. The pumping system consists of a Varian VHS10 high speed diffusion pump rated at 5300 l/s, a Varian 330 water cooled baffle, pneumatic vane style throttle valve, electropneumatic valves with sequencer and an Edwards E2M80; 57 cfm, two stage direct drive mechanical roughing pump. The evaporative system includes dual 5 KVA filament transformers with SCR controller & ammeter, two pairs of high current feedthroughs with shutter, 30" diameter domed substrate holder with motorized horizontal plane rotation & speed control, glow discharge power supply; 7KV @ 700ma, 4 kw quartz lamp substrate heaters with control & timer, Sloan Omni III quartz crystal deposition controller. A cold cathode discharge & two position thermocouple gauge are also included.

This vacuum system is guaranteed to be serviceable.
All major system components are guaranteed for 60 days from receipt.
This guarantee does not insure system performance to original manufacturer's specification without normal maintenance, such as component cleaning, "O" ring and fluid replacement plus electronic tuning & calibration. Buyer must undertake these repairs. This is not turnkey.

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