Varian VT-114 14" UHV


Product ID: 10106

Category: Front-End Processing Equipment

Equipment Type: Vacuums

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Vacuums

Equipment Details

System includes: 14" ID ss vacuum cylinder w/nine 2 3/4" Conflat ports, poppet isolation valve & 12" tall ss bell jar
w/14". Wheeler flange. Pumping equipment includes 6 triode ion pumps with a total pumping speed of 240 l/s, multi-filament titanium sublimation source, cryo panel & dual Vacsorb roughing system w/manifold. Electronics include Varian 921-0066 ion pump power supply, Varian 922-0043 TSP power supply, Varian 845 digital ionization gauge controller & bake-out power supply w/timer, without bakeout shroud. s/n M005-490 Chamber weight 325#.

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