Micro Automation 1006 Dicing Saw

Micro Automation

Product ID: 10962

Category: Back-End Processing Equipment

Equipment Type: Scribing / Dicing

Usage History: Refurbished

Current State: Functional - Installed Demonstrable

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Equipment Details

Refurbished to OEM Specs
Wafer Size: To 6 inches, To 155mm
Index Stepping Range: .00025" to wafer diameter, 6 microns to diameter
Minimum Index Step: .000125 inch, 3 microns
Cutting Feed Speed: 0.05 to 12 inches/seconds, 1.25 to 300 mm/seconds
Return Stroke: to 12 inches/seconds, 300 mm/seconds
Spindle Index Repeatability: .00016 inch, 4 microns
Chuck Flatness: .0004 inch across six inches, 10 microns over 155 mm
Cutting Depth Range: Blade limited
Cutting Depth Increments: .00025 inch, 6 microns
Chuck Height Range: 0.50 inch, 13 mm
Chuck Rotation: 0 to 120 degrees
Chuck, Fine Adjustment: +,- 3 degrees
Rotation Resolution: .0025 degrees
Microscope Magnification: 60X Monocular or Split Field TV
Cutting Wheels Diameter: 2 inches to 2.2 inches, 50 to 56 mm
Wheel Coolant Consumption: 1/2 to 1 gpm, 2 to 4 lit/min
Cooling Water Spindle: 6 gph, 24 lit/hr
Wheel Coolant Pressure: 30 psi, 2 Kg/cm2
Vacuum: 20 inches Hg min, 500 mm Hg
Air: 85 psi, 4 CFM, 6 Kg/cm2, 120 lit/min
Base Dimensions: 32 inches x 26 inches, 81 cm x 65 cm
Height (with TV): 25 inches, 73 cm
Weight: 220 lbs., 100 Kg
Power: 120 VAC 50/60 Hz, 1500 w
Spindle: Air Bearing 350 w
Spindle Speed:5,000 to 45,000 rpm
Warranty: 90 Day Warrant on parts only.

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