Cascade Microtech Summit 12000 Semi-Automatic Wafer Prober

Cascade Microtech

Product ID: 10998

Category: Back-End Processing Equipment

Equipment Type: Probers

Usage History: Refurbished

Current State: Functional - Installed Demonstrable

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Type: Probers


Equipment Details

The Cascade Microtech 12000-series probe systems allow you to access the full measurement range of your test instrumentation. Noise, leakage, stray capacitance and measurement settling times have been greatly reduced. Whatever the application: DC or RF device characterization, wafer-level reliability, e-test, modeling, or yield enhancement, the 12000-series probe stations assure best-in-the-world measurements.

EQUIPMENT CONFIGURATION & SPECIFICATIONS
Probe Station: Cascade Summit 12000-series semi-automatic, thermal wafer prober with MicroChamber(TM), FemtoGuard(TM), and AttoGuard(TM) shielding
Thermal Wafer Chuck: 8-inch/200mm Temptronic thermal, triaxial wafer chuck (Ni)
Thermal Controller: Temptronic TPO3000-2300-1; 115volts/60Hz/1Ph/20Amps
System Controller: 19-inch rack-mount computer; Windows(TM) XP operating system and Nucleus(TM) 2.7 prober control software.
Microscope: Mitutoyo FS-70 compound microscope with trinocular head, includes 10X eyepieces and (qty 1) Mitutoyo MPlan APO 20Xobjective lens.Additional microscope lenses are sold separately.
High-Stability Bridge Mount: X-Y travel = 25.4 x 25.4mm (1 x1-inch), Lift repeatability = 1u (0.04mil) typical, Tilt-back range = 2 to 3-inch (5.08-7.62cm), Weight supported = 70lb (max.)
Triaxial & Vacuum Connection Panels: 14x triaxial-to-triaxial connectors, 1x shorting link (Cascade p/n 116-643), vacuum connection panel with 10 vacuum ports (5 right, 5 left)

OPTIONAL ACCESSORIES (sold separately, please inquire about availability)
Probe Positioners: We have a limited supply of RF and DC probe positioners in stock, please call for details.
Additional Microscope Objective Lenses: Please inquire about additional objective lens magnifications in stock
Vibration Isolation Table: Vib-Iso table as shown in photos is an optional accessory that is sold separately and subject to availability at the time of order.We have several different models in stock, please inquire.


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