The Hitachi S-7000 CD SEM is an in-process evaluation tool for monitoring wafers during the during the various process steps. Non-destructive wafer inspection is ideal for observing complete wafers to identify problems such as stacking-faults, deep holes, etc.
Date of Manufacture:1991
Wafer Size:Accommodates 4", 5" and 6" wafers. Set size = 5".
Secondary Electron Image Resolution:15nm (150 angstroms) at 1kV
Magnification:100x to 100,000x
CD Measurement Range:0.05 to 100 microns
Electron Beam Source:Field emission electron gun
Accelerating Voltage(V0):0.7~3kV (in increments of 100V)
Emission Extracting Voltage(V1):0~6.3kV
Lens System:2-stage electromagnetic lens reduction
Objective Lens Aperture:Moveable type(4 openings selectable and alignable outside column
Stigmator:8-pole electromagnetic type(X,Y)
Scanning Coil:2-stage electromagnetic type
Specimen Stage Movement:X-direction = 150nm, Y-direction = 150nm, Z-direction (working distance) = 5 to 15mm, T (tilt) angle = 0 to 60 degrees, R (rotation) angle = 360 degrees
Wafer Holder:Holder replaceable for each wafer size
Wafer Setting:Auto vacuum chucking using orientation flat reference
Wafer Transfer:Wafer cassette to wafer holder in loader chamber (automatic)
Auto Loader:Single-cassette loading, random accessing
Contact Us | +1 (855) 222-5856
JULO Advisors leverage innovative tools to tailor your surplus solution: targeted mass marketing efforts, global equipment marketplace, online auctions and expert advisory services. By offering customized end-to-end surplus solutions, JULO is among the fastest growing disposition and procurement service providers in the world (Assets Under Management). + Learn More
Valuation Services - Providing data-driven asset appraisals based on current and historical transaction analytics.
Asset Management - Assisting with the development and execution of in-house and outsourced asset management programs.
Facility Disposition - Offering customized transaction advisory and execution of whole facilities, including assets.
Liquidity Solutions - Ensuring surplus assets are quickly sold through the right channels to the right buyers for the highest value.
Shipping & Logistics - Managing the logistical planning for crating and delivery of assets across the globe.
Procurement Solutions - Advising throughout the entire asset purchasing process for equipment and whole manufacturing plants .
Capitalize on your network and connections. The JULO Referral Program invites everyone to participate, share, and support each other to better the industries in which we serve. Upon a successful transaction with your referral, you will earn 10% on JULO’s equipment revenue for that transaction. + Learn More