Karl Suss MA4/6 Series III Mask Aligner

Karl Suss

Product ID: 11037

Category: Front-End Processing Equipment

Equipment Type: Mask Aligners

Usage History: Refurbished

Current State: Functional - Installed Demonstrable

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Equipment Details

Karl Suss Mask Aligners are regarded as the benchmark in semiconductor submicron research and 3D micro-system production. These innovative systems meet customer requirements for precision and reliability.

This versatile SUSS MA4/6 is available with bottom-side-alignment microscopes (optical) for accurate backside processes. Optical bottom-side-alignment (BSA) has become an important feature, especially in Microsystem Technology.
Lamphouse:350 Watt lamphouse
Optics:365nm (NUV) optics
Microscope:M200 split-field optical microscope
CIC Power Supply:CIC 500 constant intensity controller
Wafer Size:Pieces of wafers and full wafers up to 4 inches (100mm)
Wafer Chuck:Includes choice of one (1) wafer alignment chuck for Customer's desired wafer size
Mask Holder:Includes choice of one (1) mask holder for Customer's desired wafer size
Equipment Condition:Fully refurbished and guaranteed to meet the OEM's original specifications
Warranty:Includes 90-day equipment parts warranty


MA6 CONFIGURATION OPTION/UPGRADE:This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; upgrading wafer chuck to 6 inch (150mm); upgrading mask holder to 7x7 mask holder. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST

DEEP UV EXPOSURE (DUV) OPTION/UPGRADE:This option/upgrade will include replacing 350W lamphouse with a 1000W lamphouse; replacing CIC500 with a CIC1000; replacing 350W Hg lamp with a 500W HgXe lamp; upgrading optics & mirrors from UV400 to a UV200 DUV package. THIS OPTION / UPGRADE IS AVAILABLE FOR ADDITIONAL COST

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