The Matrix 105 plasma asher uses oxygen, plasma and heat to remove photoresist on silicon, GaAs and other substrates.It can also be used to remove photoresist residue after development (descum).The Matrix 105 can process up to 6? wafers, or pieces of wafers using special fixtures.
Single wafer, single cassette, robotic asher and etcher
Menu-driven microprocessor / controller
Multi-step programming (three steps + over etch)
Wafer pin lift assembly (up/down)
Mass flow controllers: qty 2
Wafer size range: 3-6 inch / 75-150 mm
RF power supply: 600W, 13.56MHz, water-cooled
Ash/Strip temperature range: 70-250 deg C
Descum temperature range: 70-150 deg C
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JULO Advisors leverage innovative tools to tailor your surplus solution: targeted mass marketing efforts, global equipment marketplace, online auctions and expert advisory services. By offering customized end-to-end surplus solutions, JULO is among the fastest growing disposition and procurement service providers in the world (Assets Under Management). + Learn More
Valuation Services - Providing data-driven asset appraisals based on current and historical transaction analytics.
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Facility Disposition - Offering customized transaction advisory and execution of whole facilities, including assets.
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Procurement Solutions - Advising throughout the entire asset purchasing process for equipment and whole manufacturing plants .
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