EV Group IQ Aligner/lens stacker/Nanoimprinter IQ-TN200

EV Group

Product ID: 11082

Category: Back-End Processing Equipment

Equipment Type: Bonders

Usage History: Refurbished

Current State: Functional - Installed Non-Demonstrable

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Type: Bonders

Equipment Details

Semi-automated top side mask aligner for 200mm

tooled for UV molding process

NanoAlign technology package

Cognex pattern recognition (PatMax)

Large Gap alignment capability

single side processing

motorized alignment stage

Internal wedge compensation unit

500W -1000W NUV light source

RPS 2110-CP 1000w Hg constant power supply

1000W Hg lamp

automated wafer loading tray swivel unit

de-ionizer at alignment/imprint stage

software for UV bonding

wafer loading tray for bond loading

chuck for 200mm wafers

5x objectives for alignment of single chips and wafer flat

tooling for UV molding process: 4"(104mm) wafer chuck and 4" stamp holder(104mm x 104mm)

manufacture date 2008

sn S080097

All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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