Axcelis Fusion 200 PCU Polo

Axcelis

Product ID: 11099

Category: Front-End Processing Equipment

Equipment Type: Photoresist

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Photoresist


Equipment Details

Axcelis Fusion 200 PCU Polo, Photostabilizer

MANUFACTURE:
Axcelis
MODEL/TYPE#:
Fusion 200 PCU Polo

DESCRIPTION:
Photostabilizer System
Model: Fusion 200 PCU Polo
Vintage: 2003

Max Wafer Size: 200mm
Shielded SECS Cables
UV Bake process application
Irradiator contains Hg High Intensity Lamp and 2.45 GHz
magnetrons for UV radiation generation
User selectable 50 lot uni-cassette, 25 uni-cassette, or
cassette-to-cassette operation
Microprocessor controlled
Pneumatic controlled uplift for irradiator
SECS I, II software interface
Through-the-Wall Compatibility
UV Port Housing
Thermal Chuck
Power: 208V, 50 Hz, 30A, 5 wire, 3 phase

90 day warranty, fully refurbished

Difference between Fusion 200 PCU POLO and Fusion 200 PCU Standard:
The Fusion 200 POLO can generate several different
levels of light intensity, while the standard PCU can only
generate two levels. Also the PCU Polo has the ablitity to
measure the intensity of the light, and allows the user to
adjust the power setting to increase the light intensity so
that it matches between tools and so that each wafer
gets the same light level.
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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