Tepla 300 Autoload PC

Tepla

Product ID: 11119

Category: Front-End Processing Equipment

Equipment Type: Wafer & Mask Scrubbers

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Microwave plasma batch system for resist stripping and wafer cleaning (currently configured for 150mm with loader)

200mm wafer capability

PC controller

Batch size: 25 wafers per load

Ceramic chamber: 9.6" diameter x 15" deep

Microwave frequency 2.45GHz

maximum power 1000 watts

4 process gas channels with MFC's calibrated for N2 1000SCCM

capacitance manometer MKS Baratron

software: manual and automatic operation, graphical display

Temperature control: IR thermometer

Optical end point detector

230v, 50/60hz, single phase, 16 amps, 2KW

CE Certified
Mactronix LTP-650E Automatic cassette loader
MKS throttle valve
Vacuum pump not included: specify oil rotary or dry pump minimum 65m3/hour (40cfm)
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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