Solitec 820ACB Coat Bake Track System

Solitec

Product ID: 11131

Category: Front-End Processing Equipment

Equipment Type: Photoresist

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Photoresist


Equipment Details

RF-1990

Solitec 820ACB coat/bake track, configured for 150mm wafers using Fluoroware A182-60MB cassettes, hotplate bake to 300C, spin coat with 0-40KRPM acceleration and max spin 200-8000RPM, automatic dispense including 2 photoresist pumps, sn 9290918. Includes 60 day operational warranty.
Manufacturer: Solitec
Name/Model: 820ACB
Reference: R-4520
Serial: 9290918
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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