Verteq Cobra-SAWS Megasonic Cleaner


Product ID: 11139

Category: Front-End Processing Equipment

Equipment Type: Photoresist

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Photoresist

Equipment Details

Semiautomatic megasonic wet process tool with HF chemical tank, VcS tank, robot, and touchscreen, Windows NT ver.2.5 operating system, process dual wafer cassettes up to 150mm, 1 module is surfactant/QDR with HALAR tank construction, VcS megasonic tank of PVDF for prediffusion clean removes particles, metals, SIO2, and organics. VcS (surface clean) uses hydrogen peroxide, ammonium hydroxide, surfactant, and DI water.
Manufacturer: Verteq
Name / Model#: Cobra-SAWS
Reference #: R-3353
Serial #: 49922
Mfg Date: 01-Dec-00

All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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