PRI/Equipe Technologies ATM205-1-S, ESC-200 Wafer Transfer Robot

PRI/Equipe Technologies

Product ID: 11142

Category: Front-End Processing Equipment

Equipment Type: Wafer Handlers

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Atmospheric single arm wafer handling robot with ESC-200 controller and interconnect cables, the Equipe/PRI 200 series robots are identitical to the 100 series except the Z axis vertical travel is 10" instead of 7".
Manufacturer: PRI/ Equipe Technologies
Name / Model#: ATM205-1-S, ESC-200
Reference #: R-3231
Serial #: ATM-6444,6523,6526,6527,6528
Mfg Date: 01-Jun-03
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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