Suss MicroTec RC8 MS3 Photoresist Spin Coater

Suss MicroTec

Product ID: 11151

Category: Front-End Processing Equipment

Equipment Type: Photoresist

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Photoresist

Equipment Details

200mm spin coater with GYRSET system for better uniformity and lower resin consumption

stainless base cabinet

Maximum 5000 rpm/sec acceleration

motorized dispense arm

multiple dispense capability for up to 2 photoresist

Cybor 512 power supply with 505 controller (will control 1-2 pumps)

1 Cybor 5126C pump

resist nozzle autoclean

cartridge dispense

2nd Cybor pump add $3500.
Manufacturer: Suss MicroTec
Name / Model#: RC8 MS3
Reference #: R-2350
Serial #: RC2276
Mfg Date: 01-Sep-99

All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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