Headway LS510 MII SPL Large Substrate Photoresist Coater


Product ID: 11152

Category: Front-End Processing Equipment

Equipment Type: Photoresist

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Photoresist

Equipment Details

Large substrate coater

22" ID bowl with vacuum chuck configured to hold 320mm x 340mm substrate

DC servomotor with maximum speed 3000 RPM

HEPA filter

auto-dispense with 6 resist pumps

1hp servomotor

14 step timers

6 speed controllers

variable dual speed acceleration and deceleration

10 dispense sequence selectors

Facilities requirements:

208v, 1phase, 15amp

vacuum: 23"Hg minimum

Nitrogen: 60-75psi

Exhaust: 150CFM @1" water

see PDF link below for general description

Includes manual with full schematics

Photoresist pumps have not been tested. We can also rebuild the pumps if required at additional cost.
Manufacturer: Headway
Name / Model#: LS510 MII SPL
Serial #: 80029
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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