Large substrate coater
22" ID bowl with vacuum chuck configured to hold 320mm x 340mm substrate
DC servomotor with maximum speed 3000 RPM
auto-dispense with 6 resist pumps
14 step timers
6 speed controllers
variable dual speed acceleration and deceleration
10 dispense sequence selectors
208v, 1phase, 15amp
vacuum: 23"Hg minimum
Exhaust: 150CFM @1" water
see PDF link below for general description
Includes manual with full schematics
Photoresist pumps have not been tested. We can also rebuild the pumps if required at additional cost.
Name / Model#: LS510 MII SPL
Serial #: 80029
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items
Contact Us | +1 (855) 222-5856
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