Suss MicroTec MA150 Mask Aligner

Suss MicroTec

Product ID: 11183

Category: Front-End Processing Equipment

Equipment Type: Mask Aligners

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Mask alignment and exposure tool completely rebuilt by Suss Microtec in 2000

4 exposure modes: vacuum, hard contact, soft contact, and proximity

1000w Hg lamphouse with CIC1000 power supply

DVM6 splitfield microscope with Olympus 5x/10x/20x objectives

150mm proximity/contact wafer holder and mask holder

software ver.7.01A

configured for 25 slot Fluoroware cassette


previously used for 150mm glass substrates

Z axis step size 1 micron for proximity alignment

wedge error compensation force 750-800g
Manufacturer: Suss MicroTec
Name / Model#: MA150
Reference #: R-3314
Serial #: 3006R
Mfg Date: 01-May-00
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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