SC Fluids MEMS Dryer

SC Fluids

Product ID: 11541

Category: Front-End Processing Equipment

Equipment Type: Other Wafer Processing

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Supercritical CO2 dryer for MEMS devices, CPD 1100 series, can process single wafers up to 150 mm diameter and 5.0 mm high, ultraclean CO2 delivery system, point of use (<.003u particle filter recirculating heater bath solvent separator and water included double walled stainless steel process chamber with motorized clamping mechanism auto lid lifter inlet valve system consists of high purity valves electropolished orbital welded tubing plc controller stores up to recipes. max pressure rating temperature requires: compressed air: clean dry filtered water: min at liquid co2 sfc or sfe grade he head educator tube aluminum cylinder.> Manufacturer: SC Fluids
Name / Model#: MEMS Dryer
Reference #: R-3290
Mfg Date: 01-Aug-02
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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