Zeiss/HSEB Axiotron 300 Wafer Inspection Station


Product ID: 11843

Category: Front-End Processing Equipment

Equipment Type: Other Wafer Processing

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

300mm wafer inspection station, configured for brightfield (VIS and 337nm UV), darkfield, DIC (Nomarski) observation. Programed settings for light, aperture, zoom, field stop and DIC analyzer, CE marked, 300mm vacuum chuck. Zeiss Objectives: Epiplan Neofluar 10x/0.30 HD DIC, Epiplan Apochromat 50x/0.90 HD DIC, Epiplan Apochromat 100x/0.95 HD DIC, Epiplan Apochromat 150x/0.95, Epiplan UV Insp 120x/0.95. TI MP-2000PF-U5 camera, Optronix S97670 camera and DEI-750D controller, MEG system with Hg-Xe lamp source, Zeiss LG-Xe 180w remote xenon illumination source, Zeiss 45 74 92 dual beam laser, autofocus (AF) assembly, Newport XY stage with 300mm x 300mm travel, Thermo VSL-337ND-S 337nm nitrogen laser, Photonic Instruments Micro-Point 2202/2279 assembly, Halcyonics (Accurian) MOD-2M active vibration isolation controller. Price: Call for quotation

Manufactuerer: ZeissHSEB
Name/Model: Axiotron 300
Reference: R-4488
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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