Lasertec VL-2000 Confocal Microscope


Product ID: 11896

Category: Front-End Processing Equipment

Equipment Type: Other Wafer Processing

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

408nm GaN (Gallium Nitrite) blue laser confocal microscope for CD measurement and surface profiling, 0.14u resolution, 1/15th second scan speed, and 1ZC1 Z axis controller, Nikon microscope with (5) BD DIC CF Plan objectives: 5x, 10x, 20x, 50x, 100x, and APO 200xBD 0.90. Semprex 12-8802-20 200mm stage with 8x8 travel, rotating 150mm wafer holder insert, and digital encoders with xy digital display, PC with image capture board and analysis version 3.1.554 image analysis software from Soft Imaging System Gmbh.
Manufacturer: Lasertec
Name / Model#: VL-2000
Reference #: R-3672
Serial #: 490083
Mfg Date: 27-Sep-01
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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