Zeiss/HSEB Axiospect 300 Automated Wafer Inspection and Review Tool


Product ID: 11899

Category: Front-End Processing Equipment

Equipment Type: Other Wafer Processing

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Wafer inspection/review station for bare and patterned wafers, 2 FOUP loaders, Axiotron 300 microscope, Equipe robot with PRE-5120 prealigner, 300mm wafer chuck with 300mm x 300mm xy stage, DIC, brightfield, darkfield, objectives: Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10,20,50 HD DIC, Epiplan Apochromat 100 HD DIC, xenon light source with fiber cable, Windows NT operating system with SmartVIEW ver.4.13 software for visual inspection and defect classification, wafer mapping, file management, image handling and processing.
Manufacturer: Zeiss/HSEB
Name / Model#: Axiospect 300
Reference #: R-3920
Serial #: 741219
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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