Nikon Optistation VII 300mm Automated Wafer Inspection Tool with FOUP Loaders


Product ID: 11900

Category: Front-End Processing Equipment

Equipment Type: Other Wafer Processing

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

300mm Inspection tool, 2 FOUP front end load ports: Asyst ISO Port FL300 with mapper and RFID, integrated ULPA filtration system, Air suspension vibration isolation table, Standard microscope unit with automated control, 10X eyepieces, Objective lens: 2.5X N.A 0.075 W.D. 8.8mm 10X N.A. 0.300 W.D. 6.50mm 20X N.A. 0.460 W.D. 3.10mm 50X N.A. 0.900 W.D 0.42mm 150X N.A. 0.900 W.D. 0.29mm 12V 100W halogen Lamp House, Robot and Robot Controller, Ceramic Robot Arm, Ceramic Rotation Arm, Macro Unit A, Wafer Chuck, Macro Movable Unit, Slider Assembly, Macro Unity B, Arched Holder, Rotation Unit Assembly, Micro Stage Unit, XY Stage / Chuck, X,Y,Z drive units, DART Contoller for image archiving and defect review, LCD Display, Keyboard & Trackball, Image Capture Board: Integral Technologies Inc video card, Sony Camera: DXC-9XX/MD
Manufacturer: Nikon
Name / Model#: Optistation VII
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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