Nanometrics 3000 thin film analyzer

Nanometrics

Product ID: 11952

Category: Front-End Processing Equipment

Equipment Type: Mask & Wafer Inspection

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Refurbished by Nanometrics factory trained technicians April, 2015

Advanced film thickness measurement system

range 480-800nm

solid stage linear diode array detector

measures 15 standard film types: see screen shot

film thickness range 250A to 35um

measurement time 0.25s to 4s per site

accomodates 75mm to 150mm wafers

10x objective

25um spot size

Nanospec 3000PHX sn 3000PHX-1299-H80161-00

manuf 12/1999

Measuring head model no. 7200-2134-Rev P7

sn 3000PHX-1299-H80161-00
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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