New Wave EZlaze 532nm with Mitutoyo FS60 microscope

New Wave

Product ID: 11956

Category: Front-End Processing Equipment

Equipment Type: Scanning Electron Microscopes

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

New Wave 532nm green laser mounted on Mitutoyo FS60 microscope, 2/10/20/50x APO objectives for semiconductor and failure analysis

Tested with 90 day warranty

Applications:

removal of topside passivation and dielectric layers including SiO2, Nitride, Polyimide, SOG, Poly-silicon, gold, aluminum, Ti-Tungsten

resistor trimming

Specifications:

0.6mj

6ns pulse width

Single shot 532nm (green) laser with a 5hz burst mode

spot marker with adjustable aperture for sizing cuts from a maximum of 50 microns square (with 50x objective) down to 1 micron square (with 100x objective)

High and low power range

remote firing via handheld or footpedal
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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