Temptronic TPO3500 Titan thermal chuck controller

Temptronic

Product ID: 11960

Category: Front-End Processing Equipment

Equipment Type: Mask & Wafer Inspection

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

  • Patented TP03500 ThermoChuck design provides exceptional thermal and mechanical stability and precision.
  • Superior Temperature Uniformity:

    At temperatures to +200C: ±0.5% or ±0.5C, whichever is greater
    At temperatures = or > 200C: ±1.0% of set temperature

  • Surface Flatness

    @ +200C: <12.5 microns ( 200 mm ); <25 microns (300mm)
    @ +300C: <25 microns

  • Surface to Base Parallelism: <20 microns @ +200C
  • Surface Isolation: > 109ohms standard; >1014ohms available
  • Surface Capacitance at ambient:

    200 mm chuck: <750 pf standard, < 250 pf option available
    300 mm chuck: <800 pf standard, < 500 pf option available

    Deflection:

  • 200 mm: <15 microns at 65 Kg
    300 mm: <6 microns at 50 Kg

     

  • Low noise DC Control System keeps electrical noise to a minimum.

  • Modular System Design for convenient, cost-effective system upgrades as wafer diameter and temperature requirements change.
  • CE Approved, ETL listed for U.S.A. and Canada and Compliant with SEMI S2-93A standards.

Temperature Stability ±0.1C

  • Precise temperature control and accuracy
  • Ramp/soak/cycle programming is controllable from front panel or via remote interface.
  • IEEE-488 and RS232 remote interface included.
  • Integrates with most major wafer probing stations, laser trimmers and inspection stations.
  • HCFC and CFC-free
  • Thermal cycling and steady-state thermal testing of wafers, hybrids and other flat devices at precise temperature
  • Ultra low noise test applications
  • High isolation for low leakage (femtoamp level), low capacitance test measurements; Co-axial and tri-axial configurations are available.
  • Ideal for high power and high probe load applications

    The TP03500 System controller operates with the user's choice of:

    1) ThermoChuck Diameter
    2) ThermoChuck Surface
    3) High temperature capacity
    4) Low temperature capacity / cooling system
    5) Power Configuration

    TP03500 ThermoChuck System Configuration Table

    All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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