Cyberscan Vantage Noncontact Profiler with Keyence LT9010M


Product ID: 11983

Category: Front-End Processing Equipment

Equipment Type: Mask & Wafer Inspection

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Laser based non contact profiler

AScan ver. 3.1 and Scan 7.1 software,

Keyence LT9010M 670nm laser sensor with .02um spot size and 1.3mm x 1.05mm field of view,

motorized xy stage (305mm x 305mm) with 0.1um resolution and 200mm x 200mm travel,

manual z, SCAN CT software displays video image, 2D profiles, and 3D topographical maps.
Manufacturer: Cyberscan
Name / Model#: Vantage
Reference #: R-4088
Serial #: 243052
Mfg Date: 01-Jul-06
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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