Applied Materials Excite High Speed Particle Detection Tool

Applied Materials

Product ID: 11992

Category: Front-End Processing Equipment

Equipment Type: Wafer Testing And Metrology

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

High Speed Particle Detection System for bare or patterned Wafers utilizing Excursion Inspection Technology (EXCITE). Blanket films can be inspected at over 60 wafers per hour and patterned wafers at over 45 wph. 0.1åµm particle detection on unpatterned silicon. Windows NT operating system. Currently configured for 200mm wafers but can be changed over to 300mm. Photo 3 shows module with dual wafer loading stations and transfer robot.
Manufacturer: Applied Materials
Name / Model#: Excite
Reference #: R-3474
Serial #: K533
Mfg Date: 01-Jan-01
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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