Semiconductor Diagnostics SPV/PDM 2030 FAaST SPV and Plasma Damage Monitor

Semiconductor Diagnostics

Product ID: 12024

Category: Front-End Processing Equipment

Equipment Type: Ion Implanters & Monitors

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Cybeq robot with laser cross slot detector, 6100 power supply, and handheld remote, EG&G 7260DSP lock in amp, SDL 800 laser diode driver, EG&G 197 light chopper, (2) Newport MM3000 motion controllers, SDI control Fe actuation monitor, SDI PDM-40a surface potential display, Fluke 45 multimeter, CE, 110vac.
Manufacturer: Semiconductor Diagnostics Inc.
Name / Model#: SPV/PDM 2030
Reference #: R-4205
Serial #: 96-120145
Mfg Date: 01-Jun-96
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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