RMS Systems/Hologenix NGS 3500 Defect Detection System

RMS Systems/Hologenix

Product ID: 12031

Category: Front-End Processing Equipment

Equipment Type: Wafer Testing And Metrology

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Equipment Details

Advanced wafer level dimensional metrology and defect detection system

motorized stage with 8"x8" XY travel

motorized focus

brightfield and darkfield inspection

5-100 defects/measurements per second typical

200mm/s staging speed

software controlled coaxial and backlight (transmitted light) with dual 150w fiber optic power supplies

maximum stage load capacity 50lbs

granite base and Z column

closed loop linear stages and Z axis with position feedback and Micro-e Mercury 3500 smart encoder systems provide better then 1um resolution

Software: RMS Vision Systems with color graphics, image archiving, and offline review of defects

Nikon microscope with motorized objective rotation, tilting ultrawide trinocular viewing head with 10x eyepieces

Hitachi CCTV, Windows XP
Manufacturer: RMS Systems/ Hologenix
Name / Model#: NGS 3500
Reference #: R-3781


All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


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