CHA SEC-600 RAP E-beam evaporator


Product ID: 12063

Category: Front-End Processing Equipment

Equipment Type: Evaporators

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

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Type: Evaporators

Equipment Details

Thin film deposition system

Average cycle time 20 minutes

High vacuum electron beam deposition system

19" dia. water cooled bell jar

3" planetary fixturing

3" single rotating dome lift-off fixturing

4 pocket e-gun with SR-10 10KW power supply and sweep controls

Inficon IC/5 crystal deposition monitor

CTI 8" cryopump with 8200 compressor and Leybold D60 roughing pump

Auto-Tech II controller

Heater power supply feedthrus

motorized hoist

Sieve trap to prevent backstreaming of mechanical pump oil

Fixture rotation controller

LN2 control and 2.5l cold trap

Granvill Philips 307 vacuum gauge controller

Leybold D65B roughing pump

Full set of manuals

208v, 3 phase, 5 wire
All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items

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