MRC 693 side sputter

MRC

Product ID: 12073

Category: Front-End Processing Equipment

Equipment Type: Sputtering Systems

Usage History: Refurbished

Current State: Functional - Disassembled Demonstrable

Ask an Expert: JULO Advisory



Call Us: +1 (855) 222-5856
Stay current on live opportunities: Subscribe >


Equipment Details

Completely rebuilt by TES (Technical Engineering Services)

new software and Planar flat screen monitor

Advanced Energy Pinnacle II DC Power supply

The TES-600 (horizontal process) series sputtering systems offer a fast cycle, dual level load lock capable of exchanging a completed 12" x 12" pallet load of substrates with a new pallet load allowing continuous operation. The pallet of substrates travels in a linear motion in front of up to three 5" x 15" magnetron cathodes. With the pallet scanning in front of the rectangular cathode the substrate deposition uniformity of +/-5% is achievable and target utilization is excellent. RF etch and substrate heating are in the process chamber.

To build the most reliable thin film equipment we incorporate GE Fanuc system automation control software and hardware. The system automation package allows the process engineer to develop a complex recipe. Once the recipe has been developed an operator can load the substrates and press start. The system software will run a repeatable process every time.

The fast cycle load lock eliminates the need to vent the process chamber to load substrates thereby reducing the pump down time along with reducing contamination of targets and interior chamber surfaces. Typically the TES-600 & 900 series sputtering systems will be able to automatically transfer the substrates from atmosphere to the process chamber and achieve a base pressure of 9 x 10-7 torr in less than seven minutes


The TES-600 (horizontal process) & TES-900 (vertical process) series sputtering systems offer a fast cycle, dual level load lock capable of exchanging a completed 12" x 12" pallet load of substrates with a new pallet load allowing continuous operation. The pallet of substrates travels in a linear motion in front of up to three 5" x 15" magnetron cathodes. With the pallet scanning in front of the rectangular cathode the substrate deposition uniformity of +/-5% is achievable and target utilization is excellent. RF etch and substrate heating are in the process chamber.

To build the most reliable thin film equipment we incorporate GE Fanuc system automation control software and hardware. The system automation package allows the process engineer to develop a complex recipe. Once the recipe has been developed an operator can load the substrates and press start. The system software will run a repeatable process every time.

The fast cycle load lock eliminates the need to vent the process chamber to load substrates thereby reducing the pump down time along with reducing contamination of targets and interior chamber surfaces. Typically the TES-600 & 900 series sputtering systems will be able to automatically transfer the substrates from atmosphere to the process chamber and achieve a base pressure of 9 x 10-7 torr in less than seven minutes


All equipment sold is carefully tested and backed by a 60 day parts warranty. Exceptions to the warranty coverage include lamps, laser tubes, and consummable items


Related Items


CONNECT WITH A SPECIALIST

Contact Us | +1 (855) 222-5856

JULO Advisory Services


JULO Advisors leverage innovative tools to tailor your surplus solution: targeted mass marketing efforts, global equipment marketplace, online auctions and expert advisory services. By offering customized end-to-end surplus solutions, JULO is among the fastest growing disposition and procurement service providers in the world (Assets Under Management). + Learn More

Valuation Services - Providing data-driven asset appraisals based on current and historical transaction analytics.

Asset Management - Assisting with the development and execution of in-house and outsourced asset management programs.

Facility Disposition - Offering customized transaction advisory and execution of whole facilities, including assets.

Liquidity Solutions - Ensuring surplus assets are quickly sold through the right channels to the right buyers for the highest value.

Shipping & Logistics - Managing the logistical planning for crating and delivery of assets across the globe.

Procurement SolutionsAdvising throughout the entire asset purchasing process for equipment and whole manufacturing plants .

 

JULO Referral Program


Capitalize on your network and connections. The JULO Referral Program invites everyone to participate, share, and support each other to better the industries in which we serve. Upon a successful transaction with your referral, you will earn 10% on JULO’s equipment revenue for that transaction+ Learn More